AMC Monitoring System(Gas / Water / Process)
AOI for passive/led/applications
Chemical Filter (Process Tool / MAU / FFU)
Confocal Scanning Laser Microscope
Ga2O3 bare wafer/ Epi wafer
HCL / C4F8 / C4F6 / CHF3 / JHT系列冷卻液
Laser Marking/AOI for led/applications
Measurement for Wafer (BOW/WARP etc…)/ Glue (Thickness)
OEM Tool / Module Manufacturing Foundry
Optical film surface defect inspection machine
Pure &Mixture-GeH4 / PH3 / TMS / B2H6 / BF3 / SiF4 / Si2H6
PVD Sputter Tool and Wafer Trimming for piezoelectric devices.
SAGs負壓鋼瓶 (AsH3 / PH3 / 11BF3 / GeF4)
Semiconductor super thin wire extension machine
Si2H6 / Si3H8 / SiCl4 / TEOS / SiH4 / SiF4
Slurry Surfactants / Additives
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