Products & Service
制品サービス
IC Front-End /Mask/EDA
台湾
中国
Mask pattern generator、Mask inspection、Mask repair、Mask CD measurement Aligner、Stepper、Wafer CD Inspection
Mask Process Chemical, Develop, Rinse、Clean, Cr-Etchant, Photoresist Stripper, Waferbond Remover, BOE Etchant, ACC, ACETIC CU CLEAN, HMDS
Metron 3D / RPM 3D metrology tool
MFC 氣體流量計 Mass Flow Controller
Nanoscale Liquid Inspection
Overlay measurement tool/ TSV front-end overlay
parts for mask etching tool
Photomask E-Beam Writer service
PR stripper、polymer cleaners
SiC /GaN/GaAs Grinding polishing tool
SiC dummy wafer / SiC plate
TASS Unit : A seismic isolation system
TDMAS / TDMAH, High-K precursor, TiW/Cu etching solution (WL-CSP)
TGS Series : A seismic isolation system for semiconductor equipment
Thermocouple/Precious metal Target
Wafer Inspection (edge & backside)
Wafer ultra shallow junction inspection.
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